JPS579287Y2 - - Google Patents
Info
- Publication number
- JPS579287Y2 JPS579287Y2 JP11568979U JP11568979U JPS579287Y2 JP S579287 Y2 JPS579287 Y2 JP S579287Y2 JP 11568979 U JP11568979 U JP 11568979U JP 11568979 U JP11568979 U JP 11568979U JP S579287 Y2 JPS579287 Y2 JP S579287Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Framework For Endless Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11568979U JPS579287Y2 (en]) | 1979-08-24 | 1979-08-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11568979U JPS579287Y2 (en]) | 1979-08-24 | 1979-08-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5633210U JPS5633210U (en]) | 1981-04-01 |
| JPS579287Y2 true JPS579287Y2 (en]) | 1982-02-23 |
Family
ID=29347922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11568979U Expired JPS579287Y2 (en]) | 1979-08-24 | 1979-08-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS579287Y2 (en]) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6211846Y2 (en]) * | 1981-05-28 | 1987-03-23 | ||
| JPS61207143U (en]) * | 1985-06-18 | 1986-12-27 | ||
| JPS6212509A (ja) * | 1985-07-02 | 1987-01-21 | Hitachi Electronics Eng Co Ltd | ウェハ搬送装置 |
| JPS62186640U (en]) * | 1986-05-16 | 1987-11-27 |
-
1979
- 1979-08-24 JP JP11568979U patent/JPS579287Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5633210U (en]) | 1981-04-01 |